Langmuir probe measurements of a large scale RF asymmetric capacitive coupled plasma

Lazović, Saša; Puač, Nevena; Malović, Gordana; Petrović, Z.Lj.

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Title:	Langmuir probe measurements of a large scale RF asymmetric capacitive coupled plasma
Authors:	Lazović, Saša ; Puač, Nevena ; Malović, Gordana ; Petrović, Z.Lj.
Issue Date:	2009
Publication:	29th International Conference on Phenomena in Ionized Gases (ICPIG 2009), July 12-17, 2009, Cancún, México
Type:	Conference Paper
URI:	https://enauka.gov.rs/handle/123456789/852171
URL:	https://www.researchgate.net/publication/240635581_Langmuir_probe_measurements_of_a_large_scale_RF_asymmetric_capacitive_coupled_plasma
Metadata source:	(Preuzeto iz ORCID-a) Lazović, Saša
M-category:	Mp. category will be shown later

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