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Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations
| Title: | Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations | Authors: | Radjenovic, B   ; Lee, JK; Radmilovic-Radjenovic, M |
Issue Date: | 2006 | Publication: | Computer Physics Communications | ISSN: | 0010-4655 Computer Physics Communications Search Idenfier |
Type: | Article | Collation: | vol. 174 br. 2 str. 127-132 | DOI: | 10.1016/j.cpc.2005.09.010 | WoS-ID: | 000234795100005 | Scopus-ID: | 2-s2.0-29144480144 | URI: | https://enauka.gov.rs/handle/123456789/888249 | M-category: | 21M21 |
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