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| Title: | Microstructural changes in TiN thin films induced by ion implantation | Authors: | Popović, M.; Novaković, M.; Peruško, Davor |
Issue Date: | 2006 | Publication: | YUCOMAT 2006 : 8th Annual Conference YUCOMAT 2006 : Programme and the book of abstracts | Publisher: | Belgrade : Institute of Technical Sciences of SASA | Type: | Conference Paper | ISBN: | 86-80321-09-5 Search Idenfier |
Collation: | str. 100-100 | URI: | https://enauka.gov.rs/handle/123456789/890163 https://vinar.vin.bg.ac.rs/handle/123456789/12671 |
M-category: | Mp. category will be shown later |
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