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Title: Microstructural changes in TiN thin films induced by ion implantation
Authors: Popović, M.; Novaković, M.; Peruško, Davor  ; Radović, Ivan  ; Milinović, V.; Mitrić, M.; Bibić, Nataša; Milosavljević, M.
Issue Date: 2006
Publication: YUCOMAT 2006 : 8th Annual Conference YUCOMAT 2006 : Programme and the book of abstracts
Publisher: Belgrade : Institute of Technical Sciences of SASA
Type: Conference Paper
ISBN: 86-80321-09-5 Search Idenfier
Collation: str. 100-100
URI: https://enauka.gov.rs/handle/123456789/890163
https://vinar.vin.bg.ac.rs/handle/123456789/12671
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