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| Title: | SiO2 deposition by reactive sputtering | Authors: | Radović, Ivan   ; Serruys, Y.; Limoge, Y.; Jaoul, O.; Bibić, Nataša |
Issue Date: | 2004 | Publication: | SPIG 2004 : 22nd Summer School and International Symposium on the Physics of Ionized Gases : Contributed papers & abstracts of invited lectures, topical invited lectures, progress reports and workshop lectures | Publisher: | Belgrade : Vinča Institute of Nuclear Sciences | Type: | Conference Paper | ISBN: | 86-7306-063-6 ИСБН није валидан Search Idenfier |
Collation: | str. 215-218 | URI: | https://vinar.vin.bg.ac.rs/handle/123456789/12856 https://enauka.gov.rs/handle/123456789/894102 |
M-category: | Mp. category will be shown later |
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