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Determination of the experimental conditions for SiO2 deposition by reactive sputtering
| Title: | Determination of the experimental conditions for SiO2 deposition by reactive sputtering | Authors: | Radović, Ivan   ; Serruys, Y.; Limoge, Y.; Jaoul, O.; Poissonnet, S.; Bibić, Nataša |
Issue Date: | 2005 | Publication: | VI Scientific Meeting Physics and Technology of Materials - FITEM '05 | Publisher: | Čačak : Technical Faculty | Type: | Conference Paper | Collation: | str. 19-19 | URI: | https://vinar.vin.bg.ac.rs/handle/123456789/12849 https://enauka.gov.rs/handle/123456789/894320 |
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