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| Title: | Effects of ion implantation on properties of TiN layers | Authors: | Popović, Maja   ; Novaković, Mirjana ; Peruško, Davor ; Radović, Ivan ; Mitrić, M.; Milosavljević, M. |
Issue Date: | 2007 | Publication: | 3SCM-2007 : 3rd Serbian Congress for Microscopy : Proceedings | Publisher: | Belgrade : Serbian Society for Microscopy : Vinča Institute of Nuclear Sciences : Faculty of Biology Novi Sad : Faculty of Technical Sciences |
Type: | Conference Paper | ISBN: | 978-86-7306-088-0  Search Idenfier |
Collation: | str. 125-126 | URI: | https://enauka.gov.rs/handle/123456789/897534 https://vinar.vin.bg.ac.rs/handle/123456789/12891 |
Project: | Модификација, синтеза и анализа наноструктурних материјала јонским сноповима, гама зрачењем и вакуумским депоновањем | M-category: | Mp. category will be shown later |
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