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Micromachined experimental structure for optimization of multilayer p/sup +/Si/(metal, semiconductor) thermopile IR detectors and thermal converters
| Title: | Micromachined experimental structure for optimization of multilayer p/sup +/Si/(metal, semiconductor) thermopile IR detectors and thermal converters | Authors: | Randjelović, Danijela   ; Djurić, Zoran ; Petrovic, R.; Lazic, Z.; Dankovic, T. |
Issue Date: | 2000 | Publication: | 2000 22nd International Conference on Microelectronics, MIEL 2000 - Proceedings | Publisher: | Institute of Electrical and Electronics Engineers (IEEE) | Type: | Conference Paper | ISBN: | 0-7803-5235-1  Search Idenfier |
Collation: | vol. 2 str. 595-597 | DOI  : | 10.1109/ICMEL.2000.838761 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/7788 https://enauka.gov.rs/handle/123456789/928915 |
M-category: | Mp. category will be shown later |
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