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From RTA to conventional annealing: Impact on optical losses and metallic character of TiN films
| Title: | From RTA to conventional annealing: Impact on optical losses and metallic character of TiN films | Authors: | Novaković, Mirjana |
Issue Date: | 2025 | Publication: | Optical Materials | ISSN: | 0925-3467 Optical Materials Search Idenfier |
Type: | Article | Collation: | vol. 160 str. 116718-116718 | DOI: | 10.1016/j.optmat.2025.116718 | WoS-ID: | 001420401300001 | Scopus-ID: | 2-s2.0-85215924006 | URI: | https://dais.sanu.ac.rs/123456789/17926 https://vinar.vin.bg.ac.rs/handle/123456789/14340 https://enauka.gov.rs/handle/123456789/966014 |
Project: | Ministarstvo nauke, tehnološkog razvoja i inovacija Republike Srbije, institucionalno finansiranje - 200017 (Univerzitet u Beogradu, Institut za nuklearne nauke Vinča, Beograd-Vinča) Ministarstvo nauke, tehnološkog razvoja i inovacija Republike Srbije, institucionalno finansiranje - 200175 (Institut tehničkih nauka SANU, Beograd) |
M-category: | 21M21 |
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