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Results 41-46 of 46

Issue DateTitleAuthor(s)TypeМ-cat.
2003Data bases for modeling plasma devices for processing of integrated circuits (✓)Petrovic, Z. Lj.; Malovic, G.  ; Nikitovic, Z.  ; Strinic, A.  ; S. Dujko  ; Raspopovic, Z.  ; Radjenovic, Radmilovic M.  ; Sasic, O.Conference Paper
Mp. category will be shown later
2002Electron kinetics in plasma etching devices containing carbon tetrafluoride (✓)Dujko, Sasa  ; Raspopović, Zoran  ; Petrovic, Zoran LjConference Paper
Mp. category will be shown later
2001Non-equilibrium plasmas in telecommunication related technologies (✓)Petrovic, Zoran Lj; Raspopovic, Zoran M  ; Makabe, ToshiakiConference Paper
Mp. category will be shown later
1999Electron diffusion tensor in time dependent ExB fields (✓)Raspopović, Zoran  ; Sakadzic, S; Petrovic, Zoran Lj; Makabe, ToshiakiConference Paper
Mp. category will be shown later
1999Negative electron mobility in a decaying Ar : F-2 plasma. The correlation between Monte Carlo and Boltzmann equation calculations. (✓)Petrovic, Zoran Lj; Raspopovic, Zoran M  ; Sakadzic, S; Dyatko, NA; Napartovich, APConference Paper
Mp. category will be shown later
1999Modeling of plasmas for dry etching in ULSI technologies (✓)Petrovic, Z.Lj.; Sakadzic, S.; Raspopović, Zoran  ; Makabe, T.Conference Paper
Mp. category will be shown later

Results 41-46 of 46