Researchers
Raspopović, Zoran
Type
Date issued
Date issued - custom
Issue Date | Title | Author(s) | Type | М-cat. |
---|---|---|---|---|
2003 | Data bases for modeling plasma devices for processing of integrated circuits (✓) | Petrovic, Z. Lj.; Malovic, G. ![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() | Conference Paper | Mp. category will be shown later |
2002 | Electron kinetics in plasma etching devices containing carbon tetrafluoride (✓) | Dujko, Sasa ![]() ![]() ![]() ![]() | Conference Paper | Mp. category will be shown later |
2001 | Non-equilibrium plasmas in telecommunication related technologies (✓) | Petrovic, Zoran Lj; Raspopovic, Zoran M ![]() ![]() | Conference Paper | Mp. category will be shown later |
1999 | Electron diffusion tensor in time dependent ExB fields (✓) | Raspopović, Zoran ![]() ![]() | Conference Paper | Mp. category will be shown later |
1999 | Negative electron mobility in a decaying Ar : F-2 plasma. The correlation between Monte Carlo and Boltzmann equation calculations. (✓) | Petrovic, Zoran Lj; Raspopovic, Zoran M ![]() ![]() | Conference Paper | Mp. category will be shown later |
1999 | Modeling of plasmas for dry etching in ULSI technologies (✓) | Petrovic, Z.Lj.; Sakadzic, S.; Raspopović, Zoran ![]() ![]() | Conference Paper | Mp. category will be shown later |