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Investigation of deep implanted carbon and oxygen channeling profiles in [110] silicon, using d-NRA and SEM
| Title: | Investigation of deep implanted carbon and oxygen channeling profiles in [110] silicon, using d-NRA and SEM | Authors: | Paneta, Valentina; Erich, Marko   ; Fazinic, S.; Kokkoris, Michael; Kopsalis, I.; Petrović, Srđan M. ; Tadić, Tonči |
Issue Date: | 2014 | Publication: | Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms | ISSN: | 0168-583X Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms Search Idenfier1872-9584 Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms Search Idenfier |
Type: | Article | Collation: | vol. 320 str. 6-11 | DOI: | 10.1016/j.nimb.2013.11.020 | WoS-ID: | 000331428000002 | Scopus-ID: | 2-s2.0-84890946280 | URI: | https://enauka.gov.rs/handle/123456789/122836 https://vinar.vin.bg.ac.rs/handle/123456789/5885 |
Project: | Fizika i hemija sa jonskim snopovima (RS-45006) SPIRIT - Support of Public and Industrial Research using Ion Beam Technology (EU-227012) Support of Public and Industrial Research Using Ion Beam Technology (SPIRIT) as an Integrated Infrastructure Initiative project |
M-category: | 21M21 |
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