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Nove primene procesa nagrizanja silicijuma u vodenom rastvoru TMAH u izradi MEMS senzora
| Title: | Nove primene procesa nagrizanja silicijuma u vodenom rastvoru TMAH u izradi MEMS senzora New applications of silicon wet etching using tmah water solution for fabrication of mems sensors. |
Authors: | Smiljanić, Milče   |
Supervisor: | Jakšić, Zoran |
Other contributors: | Tadić, Milan; Mihailović, Peđa ; Jović, Vesna ; Petričević, Slobodan |
Issue Date: | 2013 | Publication: | Универзитет у Београду | Publisher: | Београд, Србија : Универзитет у Београду, Електротехнички факултет | Type: | Doctoral theses | VBS COBISS: | 45330191 | URI: | http://nardus.mpn.gov.rs/123456789/5828 http://eteze.bg.ac.rs/application/showtheses?thesesId=3279 https://nardus.mpn.gov.rs/handle/123456789/5828 https://enauka.gov.rs/handle/123456789/126558 https://fedorabg.bg.ac.rs/fedora/get/o:11701/bdef:Content/download https://cer.ihtm.bg.ac.rs/handle/123456789/2578 |
Project: | Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008) | M-category: | 70M70 |
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