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Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry
Title  : | Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry | Authors: | Đinović, Zoran  ; Tomić, Miloš  ; Manojlović, Lazo ; Lazić, Žarko ; Smiljanić, Milče |
Issue Date: | 2008 | Publication: | 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings | ISSN: | 2159-1660  Search Idenfier |
Publisher: | Institute of Electrical and Electronics Engineers Inc. | Type: | Conference Paper | Collation: | str. 321-324 | DOI: | 10.1109/ICMEL.2008.4559286 | WoS-ID: | 000257432600065 | Scopus-ID: | 2-s2.0-51749087483 | URI: | https://enauka.gov.rs/handle/123456789/126666 https://cer.ihtm.bg.ac.rs/handle/123456789/422 |
Project: | Austrian Science Fund (FWF) - L139-N02 Integrated Microsystems Austria IMA GmbH |
M-category: | Mp. category will be shown later |
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