Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry

Rezultati

Naziv :	Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry
Autori:	Đinović, Zoran ; Tomić, Miloš ; Manojlović, Lazo ; Lazić, Žarko ; Smiljanić, Milče
Godina:	2008
Publikacija:	26th International Conference on Microelectronics, Vols 1 and 2, Proceedings
ISSN:	2159-1660 Pretraži identifikator
Izdavač:	Institute of Electrical and Electronics Engineers Inc.
Tip rezultata:	Konferencijski rad
Kolacija:	str. 321-324
DOI:	10.1109/ICMEL.2008.4559286
WoS-ID:	000257432600065
Scopus-ID:	2-s2.0-51749087483
URI:	https://enauka.gov.rs/handle/123456789/126666 https://cer.ihtm.bg.ac.rs/handle/123456789/422
Projekat:	Austrian Science Fund (FWF) - L139-N02 Integrated Microsystems Austria IMA GmbH
M-kategorija:	Mp kategorija će biti prikazana naknadno.

1
SCOPUS^TM

1
OpenCitations

Alt metrika

Dimensions

Unpaywall

Google Scholar^TM

Rezultati na eNauka su zaštićeni autorskim pravima i sva prava su zadržana, osim ako nije drugačije naznačeno.