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Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry
Title  : | Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry | Authors: | Đinović, Zoran  ; Tomić, Miloš  ; Manojlović, Lazo ; Lazić, Žarko ; Smiljanić, Milče M. |
Issue Date: | 2008 | Publication: | Micro Electronic and Mechanical Systems | Publisher: | IntechOpen | Type: | Book parts | ISBN: | 978-953-307-027-8  Search Idenfier |
Collation: | str. 51-60 | DOI: | 10.5772/7003 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/4442 https://enauka.gov.rs/handle/123456789/126667 |
Project: | The Austrian Science Fund (FWF) - the Project L139-N02 “Nanoscale measurement of physical parameters” The Integrated Microsystems Austria, IMA GmbH |
M-category: | Mp. category will be shown later |
