Results
| Title: | Silicon surface exfoliation under compression plasma flow action | Authors: | Dojčinović, Ivan P.   ; Kuraica, Milorad M. ; Randjelović, Danijela ; Mati, Ć M.; Puri, Ć J. |
Issue Date: | 2006 | Publication: | 25th International Conference on Microelectronics, MIEL 2006 - Proceedings | Publisher: | IEEE | Type: | Conference Paper | Collation: | str. 145-148 | DOI: | 10.1109/ICMEL.2006.1650915 | WoS-ID: | 000238839700025 | Scopus-ID: | 2-s2.0-77956512249 | URI: | https://physrep.ff.bg.ac.rs/handle/123456789/311 https://cer.ihtm.bg.ac.rs/handle/123456789/284 https://enauka.gov.rs/handle/123456789/202347 |
M-category: | Mp. category will be shown later |
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