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| Title: | Spatial and Time Resolved Optical Emission Spectroscopy of an ECR Plasma Etcher | Authors: | Milosavljević, Vladimir   ; N. Macgarailt; S. Daniels |
Issue Date: | 2012 | Publication: | AVS 59th International Symposium and Exhibition | Publisher: | AVS, SAD | Type: | Conference Paper | Collation: | str. 193-193 | URI: | https://enauka.gov.rs/handle/123456789/247628 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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