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Title: Three dimensional simulation of the surface roughness by isotropic and anisotropic etch processes
Authors: Radmilović-Rađenović, Marija  ; Rađenović, Branislav  
Issue Date: 2010
Publication: 63th Annual Gaseous Electronics Conference
ISSN: 0003-0503 Search Idenfier
Publisher: American Physical Society, France
Type: Conference Paper
Collation: vol. 55 br. 7 str. KWP.57-KWP.57
URI: https://enauka.gov.rs/handle/123456789/343547
Metadata source: Migrirano iz RIS podataka
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