Application of the level set method in three-dimensional simulations of the etching profile evolution for producing nano-scale devices

Rađenović, Branislav; Radmilović-Rađenović, Marija

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Title:	Application of the level set method in three-dimensional simulations of the etching profile evolution for producing nano-scale devices
Authors:	Rađenović, Branislav ; Radmilović-Rađenović, Marija
Issue Date:	2011
Publication:	Optoelectronics and Advanced Materials-Rapid Communications
ISSN:	1842-6573 Optoelectronics and Advanced Materials-Rapid Communications Search Idenfier
Publisher:	INOE Publishing House
Type:	Article
Collation:	vol. 4 br. 8 str. 1193-1195
WoS-ID:	000281734800032
URI:	https://enauka.gov.rs/handle/123456789/363191
URL:	https://oam-rc.inoe.ro/download.php?idu=1194
Metadata source:	Migrirano iz RIS podataka
M-category:	23M23

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