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Micromachining by maskless wet anisotropic etching {hkl} structures on {100} oriented silicon
| Title: | Micromachining by maskless wet anisotropic etching {hkl} structures on {100} oriented silicon | Authors: | Jović, Vesna |
Issue Date: | 2010 | Publication: | 27th International Conference on Microelectronics, MIEL 2010 - Proceedings | Type: | Conference Paper | ISBN: | 978-142447201-7 ИСБН није валидан Search Idenfier |
Collation: | str. 243-246 | DOI: | 10.1109/MIEL.2010.5490489 | Scopus-ID: | 2-s2.0-77955182615 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/757 https://enauka.gov.rs/handle/123456789/417976 |
URL: | http://eds.ieee.org/conferences.html | Project: | Inteligentni industrijski transmiteri na bazi sopstvenih IHTM senzora (RS-11025) | M-category: | Mp. category will be shown later |
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