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eNauka >  Results >  Micromachining by maskless wet anisotropic etching {hkl} structures on {100} oriented silicon
Title: Micromachining by maskless wet anisotropic etching {hkl} structures on {100} oriented silicon
Authors: Jović, Vesna ; Lamovec, Jelena  ; Smiljanić, Milče  ; Popović, Mirjana
Issue Date: 2010
Publication: 27th International Conference on Microelectronics, MIEL 2010 - Proceedings
Type: Conference Paper
ISBN: 978-142447201-7 ИСБН није валидан Search Idenfier
Collation: str. 243-246
DOI: 10.1109/MIEL.2010.5490489
Scopus-ID: 2-s2.0-77955182615
URI: https://cer.ihtm.bg.ac.rs/handle/123456789/757
https://enauka.gov.rs/handle/123456789/417976
URL: http://eds.ieee.org/conferences.html
Project: Inteligentni industrijski transmiteri na bazi sopstvenih IHTM senzora (RS-11025)
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