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Microfabrication by Mask-maskless wet Anisotropic Etching for Realization of Multilevel Structures in {100} Oriented Si
| Title: | Microfabrication by Mask-maskless wet Anisotropic Etching for Realization of Multilevel Structures in {100} Oriented Si | Authors: | Jović, Vesna  ; Smiljanić, Milče  ; Lamovec, Jelena ; Popović, M. |
Issue Date: | 2012 | Publication: | 28th International Conference on Microelectronics - Proceedings, MIEL 2012 | ISSN: | 2159-1660  Search Idenfier |
Publisher: | Institute of Electrical and Electronics Engineers Inc. | Type: | Conference Paper | Collation: | str. 139-142 | DOI: | 10.1109/MIEL.2012.6222817 | WoS-ID: | 000309119600027 | Scopus-ID: | 2-s2.0-84864230506 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/1098 https://enauka.gov.rs/handle/123456789/437295 |
Project: | Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008) European Commission 7th Framework Programme through the project Regmina, grant 205533 |
M-category: | Mp. category will be shown later |
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