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Maskless convex corner compensation technique on a (100) silicon substrate in a 25 wt% TMAH water solution
| Naziv: | Maskless convex corner compensation technique on a (100) silicon substrate in a 25 wt% TMAH water solution | Autori: | Smiljanić, Milče   ; Jović, Vesna ; Lazić, Žarko |
Godina: | 2012 | Publikacija: | Journal of Micromechanics and Microengineering | ISSN: | 0960-1317 Journal of Micromechanics and Microengineering Pretraži identifikator |
Izdavač: | Bristol : Iop Publishing Ltd. | Tip rezultata: | Naučni članak | Kolacija: | vol. 22 br. 11 str. 115011-115011 | DOI: | 10.1088/0960-1317/22/11/115011 | WoS-ID: | 000310534400012 | Scopus-ID: | 2-s2.0-84867921846 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/1118 https://enauka.gov.rs/handle/123456789/437297 |
Projekat: | Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-32008) | M-kategorija: | 21aM21a - Vodeći međunarodni časopis kategorije M21a |
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