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Etching of Uncompensated Convex Corners with Sides along and <100> in 25 wt% TMAH at 80 °C

Назив: | Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 °C | Аутори: | Smiljanić, Milče M. ![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() ![]() |
Година: | 2020 | Публикација: | Micromachines | ISSN: | 2072-666X![]() ![]() |
Издавач: | MDPI | Тип резултата: | Научни чланак | Колација: | vol. 11 br. 3 str. 253-253 | DOI: | 10.3390/mi11030253 | WoS-ID: | 000613507100001 | Scopus-ID: | 2-s2.0-85082854191 | PMID: | 32121024 | PMCID: | PMC7143182 | URI: | https://enauka.gov.rs/handle/123456789/450774 https://cer.ihtm.bg.ac.rs/handle/123456789/3490 |
Пројекат: | The authors acknowledge funding provided by the Institute of Chemistry, Technology and Metallurgy and the Institute of Physics Belgrade, through the grant by the Ministry of Education, Science and Technological Development of the Republic of Serbia. | М-категорија: | 21M21 - Водећи међународни часопис категорије M21 |