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Etching of Uncompensated Convex Corners with Sides along and <100> in 25 wt% TMAH at 80 °C
| Title: | Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 °C | Authors: | Smiljanić, Milče M.   ; Lazić, Žarko ; Jović, Vesna ; Radjenović, Branislav ; Radmilović-Radjenović, Marija |
Issue Date: | 2020 | Publication: | Micromachines | ISSN: | 2072-666X Micromachines Search Idenfier |
Publisher: | MDPI | Type: | Article | Collation: | vol. 11 br. 3 str. 253-253 | DOI: | 10.3390/mi11030253 | WoS-ID: | 000613507100001 | Scopus-ID: | 2-s2.0-85082854191 | PMID: | 32121024 | PMCID: | PMC7143182 | URI: | https://enauka.gov.rs/handle/123456789/450774 https://cer.ihtm.bg.ac.rs/handle/123456789/3490 |
Project: | The authors acknowledge funding provided by the Institute of Chemistry, Technology and Metallurgy and the Institute of Physics Belgrade, through the grant by the Ministry of Education, Science and Technological Development of the Republic of Serbia. | M-category: | 21M21 |
