Deposition on thin SiO2 layer by reactive sputtering

Radović, Ivan; Serruys, Y.; Limoge, Y.; Milosavljević, Momir; Romčević, Nebojša Ž.; Bibić, Nataša M.

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Title:	Deposition on thin SiO2 layer by reactive sputtering
Authors:	Radović, Ivan ; Serruys, Y.; Limoge, Y.; Milosavljević, Momir ; Romčević, Nebojša Ž. ; Bibić, Nataša M.
Issue Date:	2007
Publication:	Optoelectronics and Advanced Materials - Rapid Communications
ISSN:	1842-6573 Optoelectronics and Advanced Materials-Rapid Communications Search Idenfier
Type:	Article
Collation:	vol. 1 br. 5 str. 247-251
WoS-ID:	000253724700011
URI:	https://enauka.gov.rs/handle/123456789/533314 https://vinar.vin.bg.ac.rs/handle/123456789/3374
M-category:	23M23

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