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eNauka >  Results >  Spatial phase-resolved optical emission spectroscopy for understanding plasma etching uniformity
Title: Spatial phase-resolved optical emission spectroscopy for understanding plasma etching uniformity
Authors: Milosavljević, Vladimir  ; Cullen, P. J.
Issue Date: 2015
Publication: EPL
ISSN: 0295-5075 Europhysics Letters / EPL Search Idenfier
Type: Article
Collation: vol. 110 br. 4 str. 43001-43001
DOI: 10.1209/0295-5075/110/43001
WoS-ID: 000357060600013
Scopus-ID: 2-s2.0-84935857304
URI: https://enauka.gov.rs/handle/123456789/538509
https://physrep.ff.bg.ac.rs/handle/123456789/600
Metadata source: Migracija
M-category: 
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