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Spatial and Time Characteristics of Low Temperature RF Plasma for Materials Processing
| Title: | Spatial and Time Characteristics of Low Temperature RF Plasma for Materials Processing | Authors: | Djurović Stevica  ; Roberts R; Olthoff J. K |
Issue Date: | 1993 | Publication: | XVI Summer School and International Symposium on the Physics of Ionized gases Contributed Papers and Abstracts of invited lectures and progress reports, 16th Summer School and International Symposium on the Physics of Ionized gases, Belgrade, Yugoslavia, 1993, No 16 | Type: | Conference Paper | ISBN: | 86-80055-46-8  Search Idenfier |
Collation: | str. 73-92 | URI: | https://www.cris.uns.ac.rs/record.jsf?recordId=7524&source=eNauka&language=en https://enauka.gov.rs/handle/123456789/585156 |
M-category: | Mp. category will be shown later |
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