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Title: Diagnostics of silicon submicron cylindrical structures obtained by plasma flow action
Authors: Dojčinović, Ivan  ; Kuraica, Milorad  ; Purić, Jagoš 
Issue Date: 2006
Publication: Vacuum
ISSN: 0042-207X Vacuum Search Idenfier
Type: Article
Collation: vol. 80 br. 11-12 str. 1381-1385
DOI: 10.1016/j.vacuum.2006.01.020
WoS-ID: 000240753400049
Scopus-ID: 2-s2.0-33747801032
URI: https://physrep.ff.bg.ac.rs/handle/123456789/306
https://enauka.gov.rs/handle/123456789/607439
M-category: 
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