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Elimination of impurities from the surface of silicon using hydrochloric and nitric acid
| Title: | Elimination of impurities from the surface of silicon using hydrochloric and nitric acid | Authors: | Visnovec, Karl; Variawa, Chirag; Utigard, Torstein A.; Mitrašinović, Aleksandar |
Issue Date: | 2013 | Publication: | Materials Science in Semiconductor Processing | ISSN: | 1369-8001 Materials Science in Semiconductor Processing Search Idenfier |
Publisher: | Elsevier | Type: | Article | Collation: | vol. 16 br. 1 str. 106-110 | DOI: | 10.1016/j.mssp.2012.06.009 | WoS-ID: | 000312468700016 | Scopus-ID: | 2-s2.0-84870424039 | URI: | https://enauka.gov.rs/handle/123456789/765180 | Metadata source: | (Preuzeto iz ORCID-a) Mitrasinovic, Alex | M-category: | 21M21 |
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