Probes for measurement of current, voltage, and power in capacitively coupled RF plasmas

Puac, N; Dordjevic, A; Petrovic, ZL

Results

eNauka > Results > Probes for measurement of current, voltage, and power in capacitively coupled RF plasmas

Title :	Probes for measurement of current, voltage, and power in capacitively coupled RF plasmas
Authors:	Puac, N ; Dordjevic, A; Petrovic, ZL
Issue Date:	2002
Publication:	Applied Physics in Serbia-aps
Type:	Article
URI:	https://enauka.gov.rs/handle/123456789/773754
Metadata source:	(Preuzeto iz ORCID-a) Puac, Nevena
M-category:	Mp. category will be shown later

Find the DOI

Finding a DOI in CrossRef based on publication meta-data. The DOI (and metadata) with the similar data match will be displayed. ATTENTION - it doesn't have to be that publication.