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Structure investigation of photo-CVD silicon nitride films by IR and ESR spectroscopy
| Title: | Structure investigation of photo-CVD silicon nitride films by IR and ESR spectroscopy | Authors: | Nikolić, Goran  |
Issue Date: | 1990 | Publication: | Vacuum | ISSN: | 0042-207X Vacuum Search Idenfier |
Type: | Article | Collation: | vol. 40 br. 1-2 str. 143-144 | DOI: | 10.1016/0042-207X(90)90140-T | Scopus-ID: | 2-s2.0-0025650212 | URI: | https://enauka.gov.rs/handle/123456789/789427 | Metadata source: | (Preuzeto iz CrossRef-a) Nikolić, Goran | M-category: | 22M22 |
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