Top down nano technologies in production of integrated circuits and surface modification of materials

Petrovic, Zoran Lj; Radjenovic, Branislav M; Radmilovic-Radjenovic, Marija D

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Title:	Top down nano technologies in production of integrated circuits and surface modification of materials
Authors:	Petrovic, Zoran Lj; Radjenovic, Branislav M ; Radmilovic-Radjenovic, Marija D
Issue Date:	2008
Publication:	2008 26TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS
Type:	Conference Paper
Collation:	str. 19-24
DOI:	10.1109/ICMEL.2008.4559216
WoS-ID:	000257432600004
Scopus-ID:	2-s2.0-51749115744
URI:	https://enauka.gov.rs/handle/123456789/797832
Metadata source:	(Preuzeto iz Nasi u WoS)
M-category:	Mp. category will be shown later

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