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| Title: | Control of charging in high aspect ratio plasma etching of integrated circuits | Authors: | Petrovic, Zoran Lj   ; Makabe, Toshiaki |
Issue Date: | 2003 | Publication: | TELSIKS 2003: 6TH INTERNATIONAL CONFERENCE ON TELECOMMUNICATIONS IN MODERN SATELLITE, CABLE AND BROADCASTING SERVICE, VOLS 1 AND 2, PROCEEDINGS OF PAPERS | Type: | Conference Paper | Collation: | str. 119-126 | WoS-ID: | 000188740300026 | URI: | https://enauka.gov.rs/handle/123456789/807605 | Metadata source: | (Preuzeto iz Nasi u WoS) | M-category: | Mp. category will be shown later |
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