Characterization of ultrathin dielectric films prepared via layer-by-layer polyelectrolyte deposition on thermally oxidized silicon wafers

Nedić, Stanko; Aškrabić, Sonja; Vasić, Borislav; Isic, Goran; Ralevic, Uroš

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eNauka > Results > Characterization of ultrathin dielectric films prepared via layer-by-layer polyelectrolyte deposition on thermally oxidized silicon wafers

Title:	Characterization of ultrathin dielectric films prepared via layer-by-layer polyelectrolyte deposition on thermally oxidized silicon wafers
Authors:	Nedić, Stanko ; Aškrabić, Sonja ; Vasić, Borislav ; Isic, Goran ; Ralevic, Uroš
Issue Date:	2022
Publication:	15th Photonics Workshop (2022)
Type:	Other
URI:	https://enauka.gov.rs/handle/123456789/904374
Metadata source:	(Preuzeto iz ORCID-a) Isić, Goran
M-category:	Mp. category will be shown later

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