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Thickness measurement of thin films using atomic force microscopy based scratching
| Title: | Thickness measurement of thin films using atomic force microscopy based scratching | Authors: | Vasić, Borislav |
Issue Date: | 2024 | Publication: | SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES | ISSN: | 2051-672X Surface Topography-Metrology and Properties Search Idenfier |
Type: | Article | Collation: | vol. 12 br. 2 str. 025027-025027 | DOI: | 10.1088/2051-672X/ad54de | WoS-ID: | 001250046700001 | Scopus-ID: | 2-s2.0-85196437169 | URI: | https://enauka.gov.rs/handle/123456789/939297 | Project: | Ministry of Education, Science, and Technological Development of the Republic of Serbia Institute of Physics Belgrade |
Metadata source: | (Preuzeto iz Nasi u WoS) | M-category: | 22M22 |
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