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Browsing by Author S. Daniels
Showing results 1 to 12 of 12
| Issue Date | Title | Author(s) | Type | Мp-cat. |
|---|---|---|---|---|
| 2011 | Characterization of an ECR Etching Reactor using a Retarding Field Energy Analyzer | Milosavljević, Vladimir   ; B. Dolinaj; D. Gahan; N. Macgarailt; M. B. Hopkins; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2011 | Characterization of atomic oxygen emission by PROES and Ion-flux measurement in an ECR plasma etcher | Milosavljević, Vladimir ; B. Dolinaj; D. Gahan; N. Macgarailt; M. B. Hopkins; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2012 | ECR Plasma Etching Characterization using a Retarding Field Energy Analyzer | Milosavljević, Vladimir ; B. Dolinaj; D. Gahan; N. Macgarailt; M. B. Hopkins; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2010 | Evaluation of the temporal performance of a dielectric barrier discharge (DBD) through real-time optical and electrical diagnostics | Milosavljević, Vladimir ; N. O’Connor; J. Lalor; V. J. Law; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2012 | Impact of Self-Absorption on Emission Spectral Lines for Non-Equilibrium Plasma Sourc | Milosavljević, Vladimir ; E. Gudimenko; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2011 | Monitoring a Plasma Process using Actinometry | Milosavljević, Vladimir ; E. Gudimenko; C. Hayden; N. O’Connor; B. Keville; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2010 | Plasma damage of low-k dielectric materials | Milosavljević, Vladimir M. ; E. Gudimenko; C. Hayden; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2011 | Radical oxygen estimation and control in reactive ion etch plasma | Milosavljević, Vladimir ; S. Daniels; A. Cowley; Y. Zhang; S. Kechkar; E. Gudimenko; B. Keville; J. Conway; M. M. Turner | Conference Paper | Mp. category will be shown later |
| 2012 | Self-Absorption importance for OES plasma diagnostics | Milosavljević, Vladimir ; E. Gudimenko; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2012 | Significance of self-absorption for emission spectral lines | Milosavljević, Vladimir ; E. Gudimenko; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2012 | Spatial and Time Resolved Optical Emission Spectroscopy of an ECR Plasma Etcher | Milosavljević, Vladimir ; N. Macgarailt; S. Daniels | Conference Paper | Mp. category will be shown later |
| 2010 | Treatment of SiO2 single crystal wafer by a Low Pressure Plasma Discharge | Milosavljević, Vladimir ; Popović, Dušan ; A. Zekic; N. Macgearailt; S. Daniels | Conference Paper | Mp. category will be shown later |