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| Title: | Treatment of SiO2 single crystal wafer by a Low Pressure Plasma Discharge | Authors: | Milosavljević, Vladimir |
Issue Date: | 2010 | Publication: | 37th EPS Conference on Plasma Physics/Europhysics conference abstracts | Publisher: | European Physical Society, Dublin, Ireland | Type: | Conference Paper | ISBN: | 2-914771-62-2 Search Idenfier |
Collation: | vol. 34A str. P5.315-P5.315 | URI: | https://enauka.gov.rs/handle/123456789/469011 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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