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Title: Treatment of SiO2 single crystal wafer by a Low Pressure Plasma Discharge
Authors: Milosavljević, Vladimir  ; Popović, Dušan  ; A. Zekic; N. Macgearailt; S. Daniels
Issue Date: 2010
Publication: 37th EPS Conference on Plasma Physics/Europhysics conference abstracts
Publisher: European Physical Society, Dublin, Ireland
Type: Conference Paper
ISBN: 2-914771-62-2 Search Idenfier
Collation: vol. 34A str. P5.315-P5.315
URI: https://enauka.gov.rs/handle/123456789/469011
Metadata source: Migrirano iz RIS podataka
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