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Role of Atomic Oxygen in High Quality SiOx Thin Film Deposition: Exploring New Chemical Pathways for Polymerization and Surface Treatment
| Title: | Role of Atomic Oxygen in High Quality SiOx Thin Film Deposition: Exploring New Chemical Pathways for Polymerization and Surface Treatment | Authors: | Stefanović, Ilija   |
Issue Date: | 2025 | Publication: | Program and the Book of abstracts / Serbian Ceramic Society Conference Advanced Ceramics and Application XIII New Frontiers in Multifunctional Material Science and Processing, Serbia, Belgrade, 8-10th September 2025 | Publisher: | Belgrade : Serbian Ceramic Society | Type: | Conference Paper | ISBN: | 978-86-905714-2-0  Search Idenfier |
Collation: | str. 66-66 | URI: | https://dais.sanu.ac.rs/123456789/18596 https://enauka.gov.rs/handle/123456789/1019093 |
Project: | Ministarstvo nauke, tehnološkog razvoja i inovacija Republike Srbije, institucionalno finansiranje - 200175 (Institut tehničkih nauka SANU, Beograd) | M-category: | Mp. category will be shown later |
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