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| Title: | C–V profiling of ultra-shallow junctions using step-like background profiles | Authors: | Popadić, Miloš; Milovanović, Vladimir   ; Xu, Cuiqin; Sarubbi, Francesco; Nanver, Lis K. |
Issue Date: | 2010 | Publication: | Solid-State Electronics | ISSN: | 0038-1101 Solid-state Electronics Search Idenfier |
Type: | Article | Collation: | vol. 54 br. 9 str. 890-896 | DOI: | 10.1016/j.sse.2010.04.028 | WoS-ID: | 000280322300012 | Scopus-ID: | 2-s2.0-77954215647 | URI: | https://enauka.gov.rs/handle/123456789/133515 | Metadata source: | Migrirano iz RIS podataka | M-category: | 21M21 |
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