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Title: Characterisation of a large scale RF CCP reactor using derivative probes
Authors: Lazović, Saša  ; Malović, Gordana  ; Petrović, Zoran  ; Puač, Nevena  ; Spasić, Kosta  
Issue Date: 2011
Publication: 2nd International workshop on plasma nano-interfaces and plasma characterization
Publisher: Cerklje, Slovenia
Type: Conference Paper
Collation: str. 53-53
URI: https://enauka.gov.rs/handle/123456789/178438
Metadata source: Migrirano iz RIS podataka
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