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| Title: | Boron redistribution during SOI wafers thermal oxidation | Authors: | Đurić, Zoran G.  ; Smiljanić, Milče  ; Radulović, Katarina ; Lazić, Žarko |
Issue Date: | 2006 | Publication: | 25th International Conference on Microelectronics, MIEL 2006 - Proceedings | ISSN: | 2159-1660  Search Idenfier |
Publisher: | Institute of Electrical and Electronics Engineers Inc. | Type: | Conference Paper | Collation: | str. 333-336 | DOI: | 10.1109/ICMEL.2006.1650961 | WoS-ID: | 000238839700064 | Scopus-ID: | 2-s2.0-77956553625 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/245 https://enauka.gov.rs/handle/123456789/202449 |
Project: | TR6151 - Micro and Nanosystem Technologies, Structures and Sensors | M-category: | Mp. category will be shown later |
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