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| Title: | Radical oxygen estimation and control in reactive ion etch plasma | Authors: | Milosavljević, Vladimir   ; S. Daniels; A. Cowley; Y. Zhang; S. Kechkar; E. Gudimenko; B. Keville; J. Conway; M. M. Turner |
Issue Date: | 2011 | Publication: | The 4th Intel European Research & Innovation Conference, Leixlip, Ireland | Publisher: | INTEL, Irska | Type: | Conference Paper | Collation: | str. 149-149 | URI: | https://enauka.gov.rs/handle/123456789/203084 | URL: | http://www.intel.com/corporate/education/emea/event/irc/ | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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