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Title: Three-Dimensional Simulations of the Anisotropic Etching Profile Evolution for Producing Nanoscale Devices
Authors: Radjenović, B.; Radmilović-Rađenović, Marija  
Issue Date: 2011
Publication: Acta Physica Polonica A
ISSN: 0587-4246 Acta Physica Polonica. Series A: General Physics, Physics of Condensed Matter, Optics and Quantum Electronics, Atomic and Molecular Physics, Applied Physics Search Idenfier
Type: Article
Collation: vol. 119 br. 3 str. 447-450
DOI: 10.12693/aphyspola.119.447
WoS-ID: 000289498700028
Scopus-ID: 2-s2.0-79952164181
URI: https://enauka.gov.rs/handle/123456789/334810
Metadata source: Migrirano iz RIS podataka
M-category: 
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