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Three-Dimensional Simulations of the Anisotropic Etching Profile Evolution for Producing Nanoscale Devices
| Title: | Three-Dimensional Simulations of the Anisotropic Etching Profile Evolution for Producing Nanoscale Devices | Authors: | Radjenović, B.; Radmilović-Rađenović, Marija   |
Issue Date: | 2011 | Publication: | Acta Physica Polonica A | ISSN: | 0587-4246 Acta Physica Polonica. Series A: General Physics, Physics of Condensed Matter, Optics and Quantum Electronics, Atomic and Molecular Physics, Applied Physics Search Idenfier |
Type: | Article | Collation: | vol. 119 br. 3 str. 447-450 | DOI: | 10.12693/aphyspola.119.447 | WoS-ID: | 000289498700028 | Scopus-ID: | 2-s2.0-79952164181 | URI: | https://enauka.gov.rs/handle/123456789/334810 | Metadata source: | Migrirano iz RIS podataka | M-category: | 23M23 |
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