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A Simple Concave Corner Compensation of Etched Si(100) in 25 wt % TMAH Water Solution
| Title: | A Simple Concave Corner Compensation of Etched Si(100) in 25 wt % TMAH Water Solution | Authors: | Smiljanić, Milče M.   ; Lazić, Žarko ; Milinković, Evgenija ; Cvetanović, Katarina ; Rašljić Rafajilović, Milena |
Issue Date: | 2021 | Publication: | 32nd IEEE International Conference on Microelectronics, MIEL 2021 | ISSN: | 2159-1679  Search Idenfier |
Publisher: | Belgrade : Institute of Electrical and Electronics Engineers Inc. | Type: | Conference Paper | ISBN: | 978-1-6654-4528-3 Search Idenfier |
Collation: | str. 193-196 | DOI: | 10.1109/MIEL52794.2021.9569186 | Scopus-ID: | 2-s2.0-85118439817 | URI: | https://enauka.gov.rs/handle/123456789/335825 https://cer.ihtm.bg.ac.rs/handle/123456789/4855 |
Project: | Ministarstvo prosvete, nauke i tehnološkog razvoja Republike Srbije, Ugovor br. 200026 (Univerzitet u Beogradu, Institut za hemiju, tehnologiju i metalurgiju - IHTM) (RS-200026) | M-category: | Mp. category will be shown later |
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