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Development of Fast Neutral Etching for Integrated Circuits and Nanotechnologies Fast Neutrals in Gas
| Title: | Development of Fast Neutral Etching for Integrated Circuits and Nanotechnologies Fast Neutrals in Gas | Authors: | Petrović, Zoran   ; Stojanović, Vladimir ; Škoro, Nikola ; Nikitović, Željka ; Malović, Gordana ; Sivoš, Jelena ; Marić, Dragana |
Issue Date: | 2014 | Publication: | 29th International Conference on Microelectronics (MIEL) | ISSN: | 2159-1660  Search Idenfier |
Publisher: | IEEE CONFERENCE PUBLICATIONS, Belgrade, Serbia | Type: | Article | ISBN: | 978-1-4799-5296-0 Search Idenfier |
Collation: | str. 17-24 | DOI: | 10.1109/MIEL.2014.6842079 | WoS-ID: | 000360788600004 | Scopus-ID: | 2-s2.0-84904619242 | URI: | https://enauka.gov.rs/handle/123456789/337377 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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