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Development of Fast Neutral Etching for Integrated Circuits and Nanotechnologies Fast Neutrals in Gas
| Naziv: | Development of Fast Neutral Etching for Integrated Circuits and Nanotechnologies Fast Neutrals in Gas | Autori: | Petrović, Zoran   ; Stojanović, Vladimir ; Škoro, Nikola ; Nikitović, Željka ; Malović, Gordana ; Sivoš, Jelena ; Marić, Dragana |
Godina: | 2014 | Publikacija: | 29th International Conference on Microelectronics (MIEL) | ISSN: | 2159-1660  Pretraži identifikator |
Izdavač: | IEEE CONFERENCE PUBLICATIONS, Belgrade, Serbia | Tip rezultata: | Naučni članak | ISBN: | 978-1-4799-5296-0 Pretraži identifikator |
Kolacija: | str. 17-24 | DOI: | 10.1109/MIEL.2014.6842079 | WoS-ID: | 000360788600004 | Scopus-ID: | 2-s2.0-84904619242 | URI: | https://enauka.gov.rs/handle/123456789/337377 | Izvor metapodataka: | Migrirano iz RIS podataka | M-kategorija: | Mp kategorija će biti prikazana naknadno. |
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