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Characterization of hydrogen based RF plasmas suitable for removal of carbon layers
| Title: | Characterization of hydrogen based RF plasmas suitable for removal of carbon layers | Authors: | Škoro, Nikola   ; E. Gogolides |
Issue Date: | 2012 | Publication: | XXVI SPIG | Publisher: | Zrenjanin, Serbia | Type: | Conference Paper | ISBN: | 978-86-7031-242-5  Search Idenfier |
Collation: | str. 231-234 | URI: | https://enauka.gov.rs/handle/123456789/339471 | Metadata source: | Migrirano iz RIS podataka | M-category: | Mp. category will be shown later |
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