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Investigation of the effects of Ar plasma etching in Si surface by photoacoustic method
| Title: | Investigation of the effects of Ar plasma etching in Si surface by photoacoustic method | Authors: | Todorović, D. M.; Smiljanić, Miloljub; Sarajlić, Milija   ; Vasiljević-Radović, Dana ; Randjelović, Danijela |
Issue Date: | 2005 | Publication: | Journal de Physique IV (Proceedings) | ISSN: | 1155-4339 Journal de Physique IV Search Idenfier |
Publisher: | EDP Sciences | Type: | Conference Paper | Collation: | vol. 125 str. 451-453 | DOI: | 10.1051/jp4:2005125106 | WoS-ID: | 000230014700107 | Scopus-ID: | 2-s2.0-33645092960 | URI: | https://cer.ihtm.bg.ac.rs/handle/123456789/3080 https://enauka.gov.rs/handle/123456789/352856 |
Metadata source: | (Preuzeto iz Nasi u WoS) | M-category: | Mp. category will be shown later |
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