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Photoacoustic spectroscopy: investigation of sputter damage in Si surface by Ar plasma
| Title: | Photoacoustic spectroscopy: investigation of sputter damage in Si surface by Ar plasma | Authors: | Todorović, D. M.; Smiljanić, Miloljub   ; Sarajlić, Milija ; Vasiljević-Radović, Dana ; Randjelović, Danijela |
Issue Date: | 2004 | Publication: | Proceedings - 2004 24th International Conference on Microelectronics, MIEL 2004 | ISSN: | 2159-1660  Search Idenfier |
Publisher: | Institute of Electrical and Electronics Engineers (IEEE) | Type: | Conference Paper | Collation: | vol. 2 str. 429-432 | DOI: | 10.1109/ICMEL.2004.1314853 | WoS-ID: | 000222219300086 | Scopus-ID: | 2-s2.0-3142750513 | URI: | https://enauka.gov.rs/handle/123456789/352862 https://cer.ihtm.bg.ac.rs/handle/123456789/3088 |
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