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Title: Dual-frequency capacitive radiofrequency discharges: effect of low-frequency power on electron density and ion flux
Authors: Booth, J P; Curley, G; Marić, Dragana  ; Chabert, P
Issue Date: 2009
Publication: Plasma Sources Science and Technology
ISSN: 0963-0252 Plasma Sources Science and Technology Search Idenfier
Type: Article
Collation: vol. 19 br. 1 str. 015005-015005
DOI: 10.1088/0963-0252/19/1/015005
WoS-ID: 000273895300005
Scopus-ID: 2-s2.0-70450208772
URI: https://enauka.gov.rs/handle/123456789/359620
Metadata source: Migrirano iz RIS podataka
M-category: 
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