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Dual-frequency capacitive radiofrequency discharges: effect of low-frequency power on electron density and ion flux
| Naziv: | Dual-frequency capacitive radiofrequency discharges: effect of low-frequency power on electron density and ion flux | Autori: | Booth, J P; Curley, G; Marić, Dragana |
Godina: | 2009 | Publikacija: | Plasma Sources Science and Technology | ISSN: | 0963-0252 Plasma Sources Science and Technology Pretraži identifikator |
Tip rezultata: | Naučni članak | Kolacija: | vol. 19 br. 1 str. 015005-015005 | DOI: | 10.1088/0963-0252/19/1/015005 | WoS-ID: | 000273895300005 | Scopus-ID: | 2-s2.0-70450208772 | URI: | https://enauka.gov.rs/handle/123456789/359620 | Izvor metapodataka: | Migrirano iz RIS podataka | M-kategorija: | 21M21 - Vodeći međunarodni časopis kategorije M21 |
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